- 집합조직이 존재하는 TiN 코팅 층의 마찰, 마멸, 내부식 특성에 관한 연구
- ㆍ 저자명
- 김희동,김인수,성동영,이민구
- ㆍ 간행물명
- 소성가공
- ㆍ 권/호정보
- 2003년|12권 4호|pp.394-400 (7 pages)
- ㆍ 발행정보
- 한국소성가공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
TiN coated films exhibit excellent mechanical properties such as high wear, erosion and corrosion resistances and a high thermal stability. Therefore, they are widely applied to a coating material in tools, ornaments, parts and semiconductors. However, the fracture of TiN coated films frequently occurs. The distribution of preferred orientations, i.e., texture, of TiN coated films strongly influences the fracture behavior of these films. In the present study. various TiN coating layers having different textures were prepared by the reactive ion physical vapor deposition and the texture dependence of friction coefficient, erosion and corrosion in these coating layers was investigated. The sample depicting the (115) texture parallel to the coating layer normal displayed a flatter surface than that observed from the sample having the (111) texture. The friction coefficient of TiN thin films was hardly dependent on the texture of coated samples. The samples having (115) texture displayed higher wear, erosion and corrosion resistances than the samples having (111) texture.