This study was progressed in photocatalysis of VOCs using $UV/TiO_2$ which was a benign process environmentally. The experiments were peformed to know photodegradation characteristics as crystalline structure of $TiO_2$ which had anatase, rutile and P-25 (anatase : rutile = 70 : 30). The main purpose of this study was to identify photocatalytic characteristics as inlet concentration of reactants, $H_2O$, and residence time. The inlet concentration of VOCs was changed 50, 100 and 200 ppmv, and amount of $H_2O$ was changed 0, 500 and $1000{;}mg/m^3$, respectively. The deep conversion was increased as the inlet concentration decreased, and the amount of $H_2O$ increased. The deep conversion of benzene had the highest value at $1000{;}mg/m^3${;}H_2O$ and 50 ppmv of inlet concentration. The reactivity of reactants was decreased in order benzene > toluene > m-xylene. Also, the photocatalytic deep conversion was increased as residence time increased, because the contact time between reactants and catalyst was increased. In this study, intermediates had not found by GC/MSD analysis. Therefore, the reactants were completely converted to $H_2O{;}and{;}CO_2$.