The intensity is measured as functions of both distance from filament to substrate and $CH_3$OH/($CH_3$OH＋$H_2$O) ratio by OES(Optical Emission Spectroscopy) to investigate the effects of activation species such as $H_{alpha}$, $H_{eta}$, H$Upsilon;C_3$, CH on diamond film growth.$ H_{alpha}$ increases as $CH_3$OH composition decreases, while CH increases as $CH_3$OH composition increases. The intensity of $H_{alpha}$ decreases as the distance increases and that of CH increases as the distance increases. The intensities of other activation species of $H_{eta}$, H$Upsilon;C_3$, do not vary as a function of measured position distance. It varies randomly. It means that various parameters for depositing diamond thin film can be explained by the intensity(density) change of activation species, as a function of the distance of the filament.