- 열처리에 따른 SnO2 박막의 표면형상
- ㆍ 저자명
- 박경희,류현욱,서용진,이우선,홍광준,박진성,Park. Kyung-Hee,Ryu. Hyun-Wook,Seo. Yong-Jin,Lee. Woo-Sun,Hong. Kwang-Jun,Park. Jin-Seong
- ㆍ 간행물명
- 한국재료학회지
- ㆍ 권/호정보
- 2003년|13권 7호|pp.442-446 (5 pages)
- ㆍ 발행정보
- 한국재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Tin dioxide ($SnO _2$) thin films were deposited at $375^{circ}C$ on alumina substrate by metal-organic chemical vapor deposition. A few hillocks like a cauliflower were observed and the number of hillock on thin film surface increased with annealing temperature in air atmosphere. The oxygen content and the binding energy during air annealing at$ 500^{circ}C$ came to close the stoichiometric $SnO_2$. The cauliflower hillocks seem to be the result of the continuous migration of the tiny grains to release the stress of an expanded grain. Sensitivity of CO gas depended on annealing temperature and increased with increasing annealing temperature.