- 마이크로파대에서의 강유전 박막 유전 특성 평가
- ㆍ 저자명
- 박정흠,Park. Jeong-Heum
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2004년|17권 10호|pp.1061-1067 (7 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this study, ferroelectric (Ba,Sr)TiO$_3$ and high temperature superconductor YBCO thin films were fabricated by PLD (Pulsed Laser Deposition) method and tuneable bandstop filters were implemented with two different IDC(Interdigital Capacitance) gap patterns, 20${mu}{ extrm}{m}$ and 30${mu}{ extrm}{m}$ using these two thin film layers. The resonant frequency was changed by DC bias voltage. By comparing measured results with simulation, the dielectric properties of ferroelectric thin film have been extracted. The permittivity was 820 ~ 900 at 30 K and had an acceptable error range but the loss tangent had a great difference, 0.018 in 30${mu}{ extrm}{m}$ IDC gap pattern and 0.037 in 20 ${mu}{ extrm}{m}$.