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Preparation of Field Effect Transistor with $(Bi,La)Ti_3O_{12}$ Gate Film on $Y_2O_3/Si$ Substrate
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  • Preparation of Field Effect Transistor with $(Bi,La)Ti_3O_{12}$ Gate Film on $Y_2O_3/Si$ Substrate
  • Preparation of Field Effect Transistor with $(Bi,La)Ti_3O_{12}$ Gate Film on $Y_2O_3/Si$ Substrate
저자명
Chang. Ho Jung,Suh. Kwang Jong,Suh. Kang Mo,Park. Ji Ho,Kim. Yong Tae,Chang. Young Chul
간행물명
마이크로전자 및 패키징 학회지
권/호정보
2005년|12권 1호|pp.21-26 (6 pages)
발행정보
한국마이크로전자및패키징학회
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정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The field effect transistors (FETs) were fabricated ell $Y_2O_3/Si(100)$ substrates by the conventional memory processes and sol-gel process using $(Bi,La)Ti_3O_{12}(BLT)$ ferroelectric gate materials. The remnant polarization ($2Pr = Pr^+-Pr^-$) int Pt/BLT/Pt/Si capacitors increased from $22 {mu}C/cm^2$ to $30{mu}C/ cm^2$ at 5V as the annealing temperature increased from $700^{circ}C$ to $750^{circ}C$. There was no drastic degradation in the polarization values after applying the retention read pulse for $10^{5.5}$ seconds. The capacitance-voltage data of $Pt/BLT/Y_2O_3/Si$ capacitors at 5V input voltage showed that the memory window voltage decreased from 1.4V to 0.6V as the annealing temperature increased from $700^{circ}C$ to $750^{circ}C$. The leakage current of the $Pt/BLT/Y_2O_3/Si$ capacitors annealed at $750^{circ}C$ was about $510^{-8}A/cm^2$ at 5V. From the drain currents versus gate voltages ($V_G$) for $Pt/BLT/Y_2O_3/Si(100)$ FET devices, the memory window voltages increased from 0.3V to 0.8V with increasing tile $V_G$ from 3V to 5V.