For reliability assessment for machine tools, failure mode analyses by two viewpoints were studied in this paper. First, this study developed the reliability data analysis program, which searches f3r optimal failure distribution like failure rate or MTBF(Mean Time Between Failure) using failure data and reliability test data of mechanical parts in the web. Moreover, this data analysis program saves both failure data or reliability data and their failure rate or MTBF for database establishment. Second, this paper conducted failure mode analysis through such performance tests as circular movement test and vibration testing for machine tools when reliability data is not available. A developed web-based analysis program shows correlations between failure mode and performance test result and also accumulates all the data. These kinds of data analysis programs and stored data furnish valuable information for improving the reliability of mechanical system.