- 수위, 온도, 전도도 측정을 위한 다기능 One-Chip 센서의 제조
- ㆍ 저자명
- 송낙천,조용수,최시영,Song. Nak-Chun,Cho. Yong-Soo,Choi. Sie-Young
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2006년|15권 1호|pp.7-12 (6 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The multi-functional one-chip sensor has been fabricated to reduce output variation under various water environment. There were a temperature sensor, a piezoresistive type pressure sensor, and a electrode type conductivity sensor in the fabricated one-chip sensor. This sensor was measured water depth in the range of $0{sim}180cm$, temperature in the range of $0{sim}50^{circ}C$, and salinity in the range of 0 $0wt%{sim}5wt%$, respectively. Since the change of water depth in solution environment depends on various factors such as salinity, latitude, temperature, and atmospheric pressure, the water depth sensor is needed to be compensated. We tried to compensate the salinity and temperature dependence for the pressure in water by using lookup-table method.