- 다이아프램 구조를 이용한 탄소나노튜브 가스 센서의 가스 감응 특성
- ㆍ 저자명
- 조우성,문승일,김영조,박정호,주병권,Cho. Woo-Sung,Moon. Seung-Il,Kim. Young-Cho,Park. Jung-Ho,Ju. Byeong-Kwon
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2006년|15권 1호|pp.13-19 (7 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The micro-gas sensor based on carbon nanotubes (CNTs) was fabricated and its gas sensing characteristics on nitrogen dioxide ($NO_{2}$) have been investigated. The sensor consists of a heater, an insulating layer, a pair of contact electrodes, and CNT-sensing film on a micromachined diaphragm. The heater plays a role in the temperature change to modify sensor operation. Gas sensor responses of CNT-film to $NO_{2}$ at room temperature are reported. The sensor exhibits a reversible response with a time constant of a few minutes at thermal treatment temperature of $130^{circ}C$.