- $(Pb_{1-x}La_x)(Zr_{0.5}Ti_{0.5})O_3$ 박막의 La 치환량에 따른 특성
- ㆍ 저자명
- 정낙원,이성환,이동영,김동훈,Jang. Nak-Won,Lee. Seong-Hwan,Yi. Dong-Young,Kim. Dong-Hun
- ㆍ 간행물명
- 한국마린엔지니어링학회지
- ㆍ 권/호정보
- 2006년|30권 8호|pp.894-900 (7 pages)
- ㆍ 발행정보
- 한국마린엔지니어링학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The electrical characteristics associated with crystal structure changes as a function of La content for $(Pb_{1-x}La_x)(Zr_{0.5}Ti_{0.5})O_3$ thin films were investigated for applications in memory capacitors. Tetragonality of PLZT films decreased with increasing La content. Thin films with La $geq$ 20 mol% were found to be cubic. Films with La $geq$ 12 mol% exhibited broader dielectric peaks compared to those of bulk ceramics and behaved as relaxer ferroelectrics. Tetragonal PLZT film with 12 mol% La had a dielectric constant maximum of 1330 at room temperature and a charge storage density of ${sim}18{mu}C/cm^2$ at 5 V. Decrease in coercive field and remnant polarization with increase in La content were resulting from less dipolar response caused by the decreased crystal anisotropy. The leakage current densities $<10^{-8}A/cm^2$ up to 5 V bias voltage were observed for the films with La $geq$ 14 mol%.