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Beyond-CMOS: Impact of Side-Recess Spacing on the Logic Performance of 50 nm $In_{0.7}Ga_{0.3}As$ HEMTs
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  • Beyond-CMOS: Impact of Side-Recess Spacing on the Logic Performance of 50 nm $In_{0.7}Ga_{0.3}As$ HEMTs
  • Beyond-CMOS: Impact of Side-Recess Spacing on the Logic Performance of 50 nm $In_{0.7}Ga_{0.3}As$ HEMTs
저자명
Kim. Dae-Hyun,del Alamo. Jesus A.,Lee. Jae-Hak,Seo. Kwang-Seok
간행물명
Journal of semiconductor technology and science
권/호정보
2006년|6권 3호|pp.146-153 (8 pages)
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대한전자공학회
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정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

We have been investigating InGaAs HEMTs as a future high-speed and low-power logic technology for beyond CMOS applications. In this work, we have experimentally studied the role of the side-recess spacing $(L_{side})$ on the logic performance of 50 nm $In_{0.7}Ga_{0.3}As$ As HEMTs. We have found that $L_{side}$ has a large influence on the electrostatic integrity (or short channel effects), gate leakage current, gate-drain capacitance, and source and drain resistance of the device. For our device design, an optimum value of $L_{side}$ of 150 nm is found. 50 nm $In_{0.7}Ga_{0.3}As$ HEMTs with this value of $L_{side}$ exhibit $I_{ON}/I_{OFF}$ ratios in excess of $10^4$, subthreshold slopes smaller than 90 mV/dec, and logic gate delays of about 1.3 ps at a $V_{CC}$ of 0.5 V. In spite of the fact that these devices are not optimized for logic, these values are comparable to state-of-the-art MOSFETs with similar gate lengths. Our work confirms that in the landscape of alternatives for beyond CMOS technologies, InAs-rich InGaAs FETs hold considerable promise.