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A Laterally-Driven Bistable Electromagnetic Microrelay
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  • A Laterally-Driven Bistable Electromagnetic Microrelay
  • A Laterally-Driven Bistable Electromagnetic Microrelay
저자명
Ko. Jong-Soo,Lee. Min-Gon,Han. Jeong-Sam,Go. Jeung-Sang,Shin. Bo-Sung,Lee. Dae-Sik
간행물명
ETRI journal
권/호정보
2006년|28권 3호|pp.389-392 (4 pages)
발행정보
한국전자통신연구원
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

In this letter, a laterally-driven bistable electromagnetic microrelay is designed, fabricated, and tested. The proposed microrelay consists of a pair of arch-shaped leaf springs, a shuttle, and a contact bar made from silicon, low temperature oxide (LTO), and gold composite materials. Silicon-on-insulator wafers are used for electrical isolation and releasing of the moving microstructures. The high-aspect-ratio microstructures are fabricated using a deep reactive ion etching (DRIE) process. The tandem-typed leaf springs with a silicon/gold composite layer enhance the mechanical performances while reducing the electrical resistance. A permanent magnet is attached at the bottom of the silicon substrate, resulting in the generation of an external magnetic field in the direction vertical to the surface of the silicon substrate. The leaf springs show bistable characteristics. The resistance of the pair of leaf springs was $7.5;{Omega}$, and the contact resistance was $7.7;{Omega}$. The relay was operated at ${pm}0.12;V$.