The main purpose of this study is to analyze the characteristics of toluene removal by plasma, photocatalyst, and plasma/photocatalyst system with the major parameters such as flow rate, inlet toluene concentration and applied voltage, etc., experimentally. In the combined plasma/photocatalyst process, rates of toluene conversion are represented as 99% at flow rate 250, 500 mL/min while, below 97% at flow rate 1000 mL/min due to the low residence time(reaction time) at the same applied voltage 4173 voltage and toluene inlet concentration 50 ppm. The intermediate products are detected by GC/MS analysis showing the small amounts of benzoic acid, benzyl alcohol and residual ozone concentration $0.04{sim}0.05$ ppm generated by plasma process in the present system.