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비정질 GeSe 박막으로의 은-광도핑에 대한 기판의존성
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  • 비정질 GeSe 박막으로의 은-광도핑에 대한 기판의존성
저자명
여종빈,윤상돈,이현용,Yeo. Jong-Bin,Yun. Sang-Don,Lee. Hyun-Yong
간행물명
전기전자재료학회논문지
권/호정보
2007년|20권 10호|pp.852-858 (7 pages)
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한국전기전자재료학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The dependence of substrate on the Ag photodoping phenomenon into amonhous $({alpha}-)$ GeSe thin film has been investigated using holographic method. A 442 nm HeCd laser was utilized as a light source for the holographic exposure and a 632.8 nm HeNe laser to measure the variation of diffraction efficiency $(eta)$ in real time. The films (Ag and ${alpha}-GeSe$) were thermally deposited on the substrates, i.e. p-type Si(100), n-type Si(100) and slide glass. The sample structures prepared were two types: type I (Ag/${alpha}$-SeGestrate) and type II (${alpha}$<-SeGe/Agstrate). The $eta$< kinetics comprised to be three steps in which $eta$ initially increases, is saturated to be maximized $(eta_M)$, and then decreases relatively gradually. For the same substrate, the $eta_M$ values of the type II were higher than those of type I. In addition, the type II exhibited the highest $eta_M$ for p-type Si substrate, while that in type I was observed for n-type Si substrate. These tendency is explained by the diffusion of minority carrier in the films and the change of magnitude and direction in internal fields generated at the film interfaces. Atomic-force-microscope (AFM) was used to observe relief-type grating patterns.