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A monolithic silicon multi-sensor for measuring three-axis acceleration, pressure and temperature
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  • A monolithic silicon multi-sensor for measuring three-axis acceleration, pressure and temperature
  • A monolithic silicon multi-sensor for measuring three-axis acceleration, pressure and temperature
저자명
Jingbo. Xu,Yulong. Zhao,Zhuangde. Jiang,Jian. Sun
간행물명
Journal of mechanical science and technology
권/호정보
2008년|22권 4호|pp.731-739 (9 pages)
발행정보
대한기계학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

A monolithic multi-sensor for small unmanned aerial vehicles is presented in the paper; it consists of a three-axis piezoresistive accelerometer, a piezoresistive absolute pressure sensor and a silicon thermistor temperature sensor. The accelerometer is designed with four silicon beams supporting the seismic mass and appropriate piezoresistors arrangement to detect three-axis acceleration and greatly reduce cross-axis sensitivities. For minimizing the effect of stress on the temperature sensor, the thermistor is designed along [100] and [010] crystal orientation. The multi-sensor is fabricated on SOI wafers by using MEMS bulk-micromachining technology. Some effective micromachining steps are applied in the fabrication. The two-step wet anisotropic etching process on the backside of the wafers can form the whole backside shape of the multi-sensor. The metal electrode sputtered on the Pyrex glass can avoid sticking between the Pyrex glass and the seismic mass in the process of anodic bonding. The die size of the multi-sensor is $4 imes6 imes0.9mm^3$. The measured results show that the multi-sensor is appropriate for its application field.