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Development and kinematic calibration for measurement structure of a micro parallel mechanism platform
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  • Development and kinematic calibration for measurement structure of a micro parallel mechanism platform
  • Development and kinematic calibration for measurement structure of a micro parallel mechanism platform
저자명
Kang. Deuk-Soo,Seo. Tae-Won,Kim. Jong-Won
간행물명
Journal of mechanical science and technology
권/호정보
2008년|22권 4호|pp.746-754 (9 pages)
발행정보
대한기계학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

This paper presents a micro-positioning platform based on a unique parallel mechanism developed by the authors. The platform has a meso-scale rectangular shape whose size is $20 imes23mm$. The stroke is 5 mm for both the x-and y-axes and 100 degrees for the a-axis. The platform is actuated by three sets of dual stage linear actuators: a linear motor for rough positioning and a piezo actuator for fine positioning. The developed micro-positioning platform has a measurement system that consists of three linear sensors. The position and orientation values of the movable platform can be measured directly and used in a feedback control system. Selecting 18 kinematic error parameters of a measurement system (feedback control system), a two-stage kinematic calibration method is proposed. Constant error parameters are found in the first stage and variable error parameters are found in the second stage of kinematic calibration. After kinematic calibration the position error is reduced to within $0.5{mu}m$ and error reduction rate is over 90%.