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Effect of heat-treatment on the structural and electrical properties of ZnO thin films by the sol-gel method
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  • Effect of heat-treatment on the structural and electrical properties of ZnO thin films by the sol-gel method
  • Effect of heat-treatment on the structural and electrical properties of ZnO thin films by the sol-gel method
저자명
Lee. Seung-Yup,Park. Byung-Ok
간행물명
한국결정성장학회지
권/호정보
2008년|18권 2호|pp.72-75 (4 pages)
발행정보
한국결정성장학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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Zinc oxide (ZnO) thin films were prepared by a sol-gel method. The structural and electrical properties were investigated by varying drying and annealing temperatures. The thin films were coated (250 nm) by spin-coating method on glass substrates. The optimum drying temperature of ZnO thin films was 300$^{circ}C$ where the resistivity was the lowest and the preferred c-axis orientation was the highest. The annealing was carried out in air and inert atmospheric conditions. The degree of the preferred c-axis orientation was estimated. The highest preferred c-axis orientation was recorded at 600$^{circ}C$. The preferred c-axis orientation and grain growth resulted in the mobility enhancement of the ZnO thin films, and the lowest resistivity was 0.62${Omega}{cdot}cm$ at 600$^{circ}C$.