- IBAD-MgO 기판 위 다양한 완충층들의 비교 연구
- ㆍ 저자명
- 고경필,장기선,유상임,오상수,고락길,문승현,김호겸,Ko. K.P.,Jang. K.S.,Yoo. S.I.,Oh. S.S.,Ko. R.K.,Moon. S.H.,Kim. H.K.
- ㆍ 간행물명
- 한국초전도·저온공학회논문지
- ㆍ 권/호정보
- 2008년|10권 3호|pp.5-8 (4 pages)
- ㆍ 발행정보
- 한국초전도저온공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
On highly-textured IBAD-MgO templates, we have tried to find proper buffer layers among various candidate materials, including $LaMnO_3$ (LMO), $La_2Zr_2O_7$ (LAO), $LaAlO_3$ (LAO), $LaGaO_3$ (LGO), $NdGaO_3$ (NGO), and $BaZrO_3$ (BZO). All buffer layers were deposited on the IBAD-MgO templates by KrF pulsed laser deposition(PLD). LAO layer showed an armorphous phase. LZO, LGO, and NGO layers showed polycrystalline growth. Only LMO and BZO layers exhibited c-axis oriented biaxially textured films. Optimally processed LMO buffer layer at deposition temperature of $750^{circ}C$ and $PO_2$ of 100mTorr exhibited ${ riangle}{phi}$ value of ${sim}-5.2^{circ}$ and RMS roughness of 5.6nm. Interestingly, BZO buffer layers with ${ riangle}{phi}$ values of ${sim}-6^{circ}$ could be routinely produced over a wide PLD processing condition.