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Four Degree-of-Freedom Geometric Error Measurement System with Common-Path Compensation for Laser Beam Drift
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  • Four Degree-of-Freedom Geometric Error Measurement System with Common-Path Compensation for Laser Beam Drift
  • Four Degree-of-Freedom Geometric Error Measurement System with Common-Path Compensation for Laser Beam Drift
저자명
Qibo. Feng,Bin. Zhang,Cuifang. Kuang
간행물명
International journal of precision engineering and manufacturing
권/호정보
2008년|9권 4호|pp.26-31 (6 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

A precision four-degree-of-freedom measurement system has been developed for simultaneous measurement of four motion errors of a linear stage, which include straightness and angular errors, The system employs a retro-reflector to detect the straightness errors and a plane mirror to detect the angular errors. A common-path compensation method for laser beam drift is put forward, and the experimental results show that the influences of beam drift on four motion errors can be reduced simultaneously. In comparison with the API 5D laser measuring system, the accuracy for straightness measurement is about ${pm}1.5{mu}m$ within the measuring range of ${pm}650{mu}m$, and the accuracy for pitch and yaw measurements is about ${pm}1.5$ arc-seconds within the range of ${pm}600$ arc-seconds.