- Four Degree-of-Freedom Geometric Error Measurement System with Common-Path Compensation for Laser Beam Drift
- Four Degree-of-Freedom Geometric Error Measurement System with Common-Path Compensation for Laser Beam Drift
- ㆍ 저자명
- Qibo. Feng,Bin. Zhang,Cuifang. Kuang
- ㆍ 간행물명
- International journal of precision engineering and manufacturing
- ㆍ 권/호정보
- 2008년|9권 4호|pp.26-31 (6 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물|ENG| PDF텍스트
- ㆍ 주제분야
- 기타
