- Oxygen 함량에 따른 Cr-O-N 코팅막의 미세구조 및 기계적 특성에 관한 연구
- ㆍ 저자명
- 윤준서,권세훈,박인욱,이정두,김광호,Yun. Jun-Seo,Kwon. Se-Hun,Park. In-Wook,Lee. Jeong-Du,Kim. Kwang-Ho
- ㆍ 간행물명
- 한국표면공학회지
- ㆍ 권/호정보
- 2009년|42권 5호|pp.220-226 (7 pages)
- ㆍ 발행정보
- 한국표면공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Cr-O-N coatings having different oxygen contents were deposited on Si wafer and SUS 304 substrates by an arc ion plating technique using Cr target in $Ar/O_2/N_2$ gaseous atmosphere. As increasing oxygen content in the coating, the microstructure of Cr-O-N coating changed from polycrystalline having NaCl structure to amorphous structure. Further increase of oxygen content resulted in phase transformation from amorphous to rhombohedral structure. From the variations of d value and average grain size, it was revealed that the maximum solubility of oxygen in Cr-O-N coating was about 21 at.%. And the maximum micro-hardness of 2751HK was obtained in this composition. The lowest friction coefficient was measured in the coating having 34.8 at.% of oxygen. However, more narrow width of wear track was found in the coating having 30.1 at.% of oxygen.