- Si 결합 다공성 탄화규소의 미세구조 및 통기도 특성 -카본 함량 변화 중심
- ㆍ 저자명
- 송인혁,박미정,김해두,김영욱,배지수,Song. In-Hyuck,Park. Mi-Jung,Kim. Hai-Doo,Kim. Young-Wook,Bae. Ji-Soo
- ㆍ 간행물명
- 한국세라믹학회지
- ㆍ 권/호정보
- 2010년|47권 6호|pp.546-552 (7 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The achievement of high gas permeability is a key factor in the development of porous SiC ceramics for applications of hot gas filter, vacuum chuck, and air spindle. However, few reports on the gas permeability of porous SiC ceramics can be found in the literature. In this paper, porous SiC ceramics were fabricated at temperatures ranging from $1600^{circ}C$ to $1800^{circ}C$ using the mixing powders of SiC, silicon, carbon and boron as starting materials. In some samples, expanded hollow microspheres as a pore former were used to make a cellular pore structure. It was possible to produce Si bonded SiC ceramics with porosities ranging from 42% to 55%. The maximum bending strength was 58MPa for the carbon content of 0.2 wt% and sintering temperature of $1700^{circ}C$. The increase of air permeability was accelerated by addition of hollow microsphere as a pore former.