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레이저를 이용한 결정질 실리콘 태양전지의 Double Texturing 제조 및 특성
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  • 레이저를 이용한 결정질 실리콘 태양전지의 Double Texturing 제조 및 특성
저자명
권준영,한규민,최성진,송희은,유진수,유권종,김남수,Kwon. Jun-Young,Han. Kyu-Min,Choi. Sung-Jin,Song. Hee-Eun,Yoo. Jin-Soo,Yoo. Kwon-Jong,Kim. Nam-Soo
간행물명
한국재료학회지
권/호정보
2010년|20권 12호|pp.649-653 (5 pages)
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한국재료학회
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정기간행물|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

In this paper, double texturization of multi crystalline silicon solar cells was studied with laser and reactive ion etching (RIE). In the case of multi crystalline silicon wafers, chemical etching has problems in producing a uniform surface texture. Thus various etching methods such as laser and dry texturization have been studied for multi crystalline silicon wafers. In this study, laser texturization with an Nd:$YVO_4$ green laser was performed first to get the proper hole spacing and $300{mu}m$ was found to be the most proper value. Laser texturization on crystalline silicon wafers was followed by damage removal in acid solution and RIE to achieve double texturization. This study showed that double texturization on multi crystalline silicon wafers with laser firing and RIE resulted in lower reflectance, higher quantum yield and better efficiency than that process without RIE. However, RIE formed sharp structures on the silicon wafer surfaces, which resulted in 0.8% decrease of fill factor at solar cell characterization. While chemical etching makes it difficult to obtain a uniform surface texture for multi crystalline silicon solar cells, the process of double texturization with laser and RIE yields a uniform surface structure, diminished reflectance, and improved efficiency. This finding lays the foundation for the study of low-cost, high efficiency multi crystalline silicon solar cells.