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Polymer Micromachined Flexible Tactile Sensor for Three-Axial Loads Detection
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  • Polymer Micromachined Flexible Tactile Sensor for Three-Axial Loads Detection
  • Polymer Micromachined Flexible Tactile Sensor for Three-Axial Loads Detection
저자명
Choi. Woo-Chang
간행물명
Transactions on electrical and electronic materials
권/호정보
2010년|11권 3호|pp.130-133 (4 pages)
발행정보
한국전기전자재료학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

A flexible three-axial tactile sensor was fabricated on Kapton polyimide film using polymer micromachining technology. Nichrome (Ni:Cr = 8:2) strain gauges were positioned on an etched membrane to detect normal and shear loads. The optimal positions of strain gauges were determined through strain distribution from finite element analysis. The sensor was evaluated by applying normal and shear loads from 0 N to 0.8 N using an evaluation system. Sensitivity of the tactile sensor to normal and shear loads was about 206.6 mV/N and 70.1 mV/N, respectively. The sensor showed good linearity, and its determination coefficient ($R^2$) was about 0.982. The developed sensor can be applied in a curved or compliant surface that requires slip detection and flexibility, such as a robotic fingertip.