- 유연기판을 위한 나노임프린트리소그래피 시스템 설계
- ㆍ 저자명
- 임형준,이재종,최기봉,김기홍,류지형,Lim. Hyung-Jun,Lee. Jae-Jong,Choi. Kee-Bong,Kim. Gee-Hong,Ryu. Ji-Hyeong
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2011년|28권 4호|pp.513-520 (8 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The NIL processes have been studied to implement low cost, high throughput and high resolution application. A RNIL(roller NIL) is an alternative approach to flat nanoimprint lithography. RNIL process is necessary to transfer patterns on flexible substrates. Compared with flat NIL, RNIL has the advantages of better uniformity, less pressing force, and the ability to repeat the patterning process continuously on a large substrate. This paper studies the design, construction and verification of a thermal RNIL system. The proposed RNIL system can easily adopt the flat shaped hot plate which is one of the most important technologies for NIL. The NIL system can be used to transfer patterns from a flexible stamp to a flexible substrate, from a flexible stamp to a Si substrate, and from a roller stamp to a flexible substrate, etc. Patterning on flexible substrates is one of the key technologies to produce bendable displays, solar cells and other applications.