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Syntheses and Properties of Quaternary Cr-Ti-B-N Coatings by a High Power Impulse Magnetron Sputtering Technique
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  • Syntheses and Properties of Quaternary Cr-Ti-B-N Coatings by a High Power Impulse Magnetron Sputtering Technique
  • Syntheses and Properties of Quaternary Cr-Ti-B-N Coatings by a High Power Impulse Magnetron Sputtering Technique
저자명
Myoung. Hee-Bok,Zhang. Teng Fei,Park. Jong-Keuk,Kim. Doo-In,Kim. Kwang Ho
간행물명
한국표면공학회지
권/호정보
2012년|45권 6호|pp.232-241 (10 pages)
발행정보
한국표면공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Cr-Ti-B-N coatings were synthesized by a hybrid coating system combining high power impulse magnetron sputtering (HIPIMS) and DC pulse magnetron sputtering from a $TiB_2$ and a Cr target in argon-nitrogen environment, respectively. By changing the power applied on the Cr and $TiB_2$ cathodes, the Cr-Ti-B-N coatings with various Ti/Cr ratio and B content were deposited. The phase structure, microstructure and chemical compositions of the Cr-Ti-B-N coatings were studied by X-ray diffraction (XRD), transmission scanning electron microscopy (TEM), and X-ray photoelectron spectroscopy (XPS). With increase of Cr element in the coatings, the nanocomposite microstructure consisting of nano-sized (Cr, Ti) N crystallites and amorphous BN phase were obtained in the coatings. The microhardness of the Cr-Ti-B-N coatings exhibited a peak value of ~41 GPa for the $CrTi_{0.1}B_{0.4}N_{1.3}$, and then decreased with further increase of Cr content in the coatings, and all the coatings exhibited low friction coefficient. The oxidation and corrosion behavior of the Cr-Ti-B-N coatings revealed better properties due to the formation of a nanocomposite microstructure.