- 나노포지셔너 개발을 위한 테스트벤치 제작
- ㆍ 저자명
- 권지용,박근제,유원진,이치범,Kwon. Ji Yong,Park. Geun Je,Ryu. Won Jin,Lee. Chibum
- ㆍ 간행물명
- 한국생산제조시스템학회지
- ㆍ 권/호정보
- 2013년|22권 3호|pp.593-599 (7 pages)
- ㆍ 발행정보
- 한국생산제조시스템학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this study, a test-bench for developing and verifying a 1- or 2-axis nanopositioner was manufactured. Using this test-bench, adesigned and manufactured flexure stage based on an analysis can configure nanopositioning systems. A breadboard and fixture were fabricated to be equipped with various types of mechanisms and sizes of stages. The test-bench has linear encoders for calibrating sensors and verifying the orthogonality and parasitic motion of 2-axis nested-type nanopositioners. The controller was developed using LabVIEW and a TI microcontroller. A case study that exemplified the test bench for developing a nanopositioner by senior undergraduate students is shown.