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NiO Films Formed at Room Temperature for Microbolometer
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  • NiO Films Formed at Room Temperature for Microbolometer
  • NiO Films Formed at Room Temperature for Microbolometer
저자명
Jung. Young-Chul,Koo. Gyohun,Lee. Jae-Sung,Hahm. Sung-Ho,Lee. Yong Soo
간행물명
Journal of sensor science and technology
권/호정보
2013년|22권 5호|pp.327-332 (6 pages)
발행정보
한국센서학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Nickel oxide films using RF sputter was formed on the $SiO_2/Si$ substrate at the room temperature controlled with water circulation system. The feasibility of nickel oxide film as a bolometric material was demonstrated. GIXRD spectrum on NiO(111), NiO(200), and NiO(220) orientation expected as the main peaks were appeared in the grown nickel oxide films. The typical resistivity acquired at the RF power of 100W was about $34.25{Omega}{cdot}cm$. And it was reduced to $18.65{Omega}{cdot}cm$ according to the increase of the RF power to 400W. The TCR of fabricated micro-bolometer with the resistivity of $34.25{Omega}{cdot}cm$ was $-2.01%/^{circ}C$. The characteristics of fabricated nickel oxide film and micro-bolometer were analyzed with XRD pattern, resistivity, TCR, and SEM images.