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A Simple Plane-Shaped Micro Stator Using Silicon Substrate Mold and Enamel Coil
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  • A Simple Plane-Shaped Micro Stator Using Silicon Substrate Mold and Enamel Coil
  • A Simple Plane-Shaped Micro Stator Using Silicon Substrate Mold and Enamel Coil
저자명
Choi. Ju Chan,Choi. Young Chan,Jung. Dong Geun,Lee. Jae Yun,Min. Seong Ki,Kong. Seong Ho
간행물명
Journal of sensor science and technology
권/호정보
2013년|22권 5호|pp.333-337 (5 pages)
발행정보
한국센서학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

This study proposes a simply fabricated micro stator for higher output power than previously reported micro stators. The stator has been fabricated by inserting enamel coil in silicon mold formed by micro etching process. The most merits of the proposed micro stator are the simple fabrication process and high output power. Previously reported micro stators have high resistance because the micro coil is fabricated by relatively thin-film-based deposition process such as sputtering and electroplating. In addition, the previously reported micro coil has many electrical contact points for forming the coil structure. These characteristics of the micro stator can lead to low performance in output power. However, the proposed micro stator adopts commercially available enamel coil without any contact point. Therefore, the enamel coil of the proposed micro stator has low junction resistance due to the good electrical quality compared with the deposited or electroplated metal coil. Power generation tests were performed and the fabricated stator can produce 5.4 mW in 4000 RPM, $1{Omega}$ and 0.3 mm gap. The proposed micro stator can produce larger output power than the previously reported stator spite of low RPM and the larger gap between the permanent magnet and the stator.