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Formation of Threshold Switching Chalcogenide for Phase Change Switch Applications
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  • Formation of Threshold Switching Chalcogenide for Phase Change Switch Applications
  • Formation of Threshold Switching Chalcogenide for Phase Change Switch Applications
저자명
Bang. Ki Su,Lee. Seung-Yun
간행물명
Applied science and convergence technology
권/호정보
2014년|23권 1호|pp.34-39 (6 pages)
발행정보
한국진공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The programmable switches which control the delivery of electrical signals in programmable logic devices are fabricated using memory technology. Although phase change memory (PCM) technology is one of the most promising candidates for the manufacturing of the programmable switches, the threshold switching material should be added to a PCM cell for realization of the programmable switches based on PCM technology. In this work, we report the impurity-doped $Ge_2Sb_2Te_5$ (GST) chalcogenide alloy exhibiting threshold switching property. Unlike the GST thin film, the doped GST thin film prepared by the incorporation of In and P into GST is not crystallized even at the postannealing temperature higher than $200^{circ}C$. This specific crystallization behavior in the doped GST thin film is attributed to the stabilization of the amorphous phase of GST by In and P doping.