- 듀티 싸이클 및 펄스 주파수가 TiAlN 코팅막의 미세구조와 기계적 특성에 미치는 영향에 관한 연구
- ㆍ 저자명
- 전성용,황주연,Chun. Sung-Yong,Hwang. Ju Yeon
- ㆍ 간행물명
- 한국세라믹학회지
- ㆍ 권/호정보
- 2014년|51권 5호|pp.447-452 (6 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper presents the effects of pulse plasma parameters such as duty cycle and pulse frequency on the properties of TiAlN coatings deposited by asymmetric bipolar pulsed DC magnetron sputtering systems. The results show that, with decreasing duty cycle and increasing pulse frequency, the coating morphology changes from a columnar structure to a dense structure with finer grains. Pulsed sputtered TiAlN coatings showed higher hardness, higher residual stress, and smaller grain sizes than did DC prepared TiAlN coatings. Moreover, residual stress and nanoindentation hardness of pulsed sputtered TiAlN coatings increased with increasing pulse frequency. Meanwhile, the surface roughness decreased continuously with increasing pulsed DC frequency up to 50 kHz.