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플라즈마 중합된 Styrene을 유기박막으로 사용한 하이브리드형 OLED 봉지기술
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  • 플라즈마 중합된 Styrene을 유기박막으로 사용한 하이브리드형 OLED 봉지기술
저자명
정건수,이붕주,신백균,Jung. Kun-Soo,Lee. Boong-Joo,Shin. Paik-Kyun
간행물명
전기학회논문지= The Transactions of the Korean Institute of Electrical Engineers
권/호정보
2014년|63권 10호|pp.1412-1416 (5 pages)
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대한전기학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

We report thin-film organic moisture barriers based on polystyrene(PS) laminates deposition by PECVD for an encapsulation of OLEDs. The organic polystyrene thin-film has the benzene ring structure and high hydrophobic characteristics and it was polymerized by PECVD in dry process. Life time properties of Ca test were obtained 32 minutes at the RF 100W process conditions. From the AFM test, the roughness of multi-layer thin-film was more excellent rather than that of a single-layer thin-film. In addition, 5 layers of the multi-layer film properties were obtained 45 minutes. So that the optical and electrical properties were not affected with these plasma polymerized organic thin-film encapsulation. For life time improvement, the inorganic $Al_2O_3$ thin-film were deposited 5nm using ALD atomic layer deposition. The WVTR(Water Vaper Transmission Rate) value of hybrid thin-film encapsulation in the optimum process conditions was resulted by less than $10-3g/m^2/day$. From the results of experiment, plasma polymerized hybrid encapsulation was suggested as the flexible display applications.