Fast tool servo (FTS) is an enabling technology to fabricate various shapes of functional surface geometries in a precise and controllable manner. FTS can be also employed as a straightforward and efficient surface treatment way of making such products more durable. In this work, process characteristics using high-precision FTS-based surface texturing were qualitatively and quantitatively investigated to provide a class of surface design rule. The morphologies of surfaces processed with different conditions were first examined by observing the resultant 2D/3D surface profiles. In addition, the effects of the surface treatment using FTS on hardness and wear properties were characterized and compared to those without treatment.