- 볼렌즈를 이용한 광학식 진직도 측정시스템
- ㆍ 저자명
- 이민호,조남규,Lee. Minho,Cho. Nahm-Gyoo
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2014년|31권 12호|pp.1133-1139 (7 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper proposes a simple method to improve a sensitivity of a straightness measurement system for a linear stage, which is applied to a system based on a geometric optic method. An optical system for this method is composed of a corner-cube retro-reflector, a ball-lens and a twodimensional position sensitive detector (2D PSD). The effectiveness of the proposed method was examined theoretically, and verified experimentally using a prototype measurement system. The results show that the measuring sensitivity was dependent on the size of the ball-lens and the setup position of PSD from the ball-lens, and that the proposed method is efficient method to improve the measuring sensitivity.