기관회원 [로그인]
소속기관에서 받은 아이디, 비밀번호를 입력해 주세요.
개인회원 [로그인]

비회원 구매시 입력하신 핸드폰번호를 입력해 주세요.
본인 인증 후 구매내역을 확인하실 수 있습니다.

회원가입
서지반출
합산회로를 통하여 타축감도가 자체상쇄된 6빔 가속도센서의 제조
[STEP1]서지반출 형식 선택
파일형식
@
서지도구
SNS
기타
[STEP2]서지반출 정보 선택
  • 제목
  • URL
돌아가기
확인
취소
  • 합산회로를 통하여 타축감도가 자체상쇄된 6빔 가속도센서의 제조
  • Fabrication of six-beam accelerometer with self-eliminated off-axis sensitivity by summing circuit
저자명
심준환,김동권,이종현
간행물명
電子工學會論文誌. Journal of the Korean Institute of Telematics and Electronics. D
권/호정보
1998년|2호|pp.33-39 (7 pages)
발행정보
대한전자공학회
파일정보
정기간행물|
PDF텍스트
주제분야
기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

A six-beam accelerometer with self-compensated off-axis sensitivity was fabricated onthe selectively diffused (111)-oriented n/n$^{+}$/n silicon substrates by a unique porous silicon micromachining technique, which has self-stip characteristics and highly seletive formation of porous silicon layer during anodic reaction. Also, the characteristics of the fabricated accelerometer were investigated. The sensitivity of the acceleormeter added up outputs of three bridges through a summing circuit was 0.68 mV/g and the nonlinearity was less than 2% of the full scale output. The measured first resonant frequency was 4.236 kHz. When the outputs of three bridges were compared to summing output of bridges obtained through summing circuit, the normal output for Z-axis acceleration exhibited the same value s summing outputs of three bridges without reduction of sensitivity and thus the sensitivity decrease due to additional beam was compensated. Although a maximum off-axis sensitivity in one bridge of the accelerometer showed 17% of normal sensitivity, the off axis sensitivity obtained from summing output of three bridges decreased to 1.0%. Therefore, the self-elimination of off-axis sensitivity can be simply realized by obtaining the output of the sensor through summing circuit.t.