- ZnO 나노와이어를 이용한 FET 소자 제작 및 특성 평가
- ㆍ 저자명
- 김경원,오원석,장건익,박동원,이정오,김범수,Kim. K.W.,Oh. W.S.,Jang. G.E.,Park. D.W.,Lee. J.O.,Kim. B.S.
- ㆍ 간행물명
- 한국표면공학회지
- ㆍ 권/호정보
- 2008년|41권 1호|pp.12-15 (4 pages)
- ㆍ 발행정보
- 한국표면공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The zinc oxide(ZnO) nanowires were deposited on Si(001) substrates by thermal chemical vapour deposition without any catalysts. SEM data suggested that the grown nanostructures were the well-aligned ZnO single crystals with preferential orientation. Back-gate ZnO nanowire field effect transistors(FET) were successfully fabricated using a photolithography process. The fabricated nanowire FET exhibits good contact between the ZnO nonowire and Au metal electrodes. Based on I-V characteristics it was found out that the ZnO nanowire revealed a characteristic of n-type field effect transistor. The drain current increases with increasing drain voltage, and the slopes of the $I_{ds}-V_{ds}$ curves are dependent on the gate voltage.