- λ/4 흡수층 구조를 갖는 NDIR 이산화탄소 가스센서용 적외선 센서의 제조 및 특성
- ㆍ 저자명
- 이성현,남태운,Lee. Sung-Hyun,Nam. Tae-Woon
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2008년|21권 11호|pp.1005-1009 (5 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A noble infrared $lambda/4$ absorbing structure using metal reflector was studied for uncooled infrared sensors. This paper described the design and the fabrication of IR uncooled detectors which were composed of 21 by 21 elements using the surface micromachining technology. The characteristics of the array were investigated in the spectral region of 4.26 ${mu}m$. The fabricated detectors exhibited the thermal mass of $9.75 imes10^{-9}$ J/K, the thermal conductance of $1.31 imes10^{-6}$ W/K, the thermal time constant of 7.4 ms, the responsivity of $1.07 imes10^5$ V/W and the detectivity of $1.04 imes10^9$ $cmHz^{1/2}/W$, at the chopper frequency of 10 Hz and the bias current of 9.22${mu}A$. Finally the absorptance efficiency of $lambda/4$ absorbing structure was about 23.2 % higher than that of absence absorbing structure.