- 레이저 빔 가공과 전해 에칭을 이용한 미세 가공
- ㆍ 저자명
- 김장우,권민호,정도관,주종남,Kim. Jang-Woo,Kwon. Min-Ho,Chung. Do-Kwan,Chu. Chong-Nam
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2012년|29권 10호|pp.1089-1095 (7 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Laser beam machining (LBM) using nanosecond pulsed laser is widely known to be rapid and non-wear process for micromachining. However, the quality itself cannot meet the precision standard due to the recast layer and heat affected zone. In this paper, a fabrication method for machining micro features in stainless steel using a hybrid process of LBM using nanosecond pulsed laser and electrochemical etching (ECE) is reported. ECE uses non-contacting method for precise surface machining and selectively removes the recast layer and heat affected zone produced by laser beam in an effective way. Compared to the single LBM process, the hybrid process of LBM and ECE enhanced the quality of the micro features.